Glove Box
Integrated Systems
PLASSYS offers a wide variety of systems integrated in glove box - Sputtering systems, Evaporation systems (thermal or electron beam gun). Any combination of deposition sources inside a single chamber or in two different chambers and the whole unit integrated into a single glove box.
- Simple Pyrex bell jar chamber with optional electrical substrate elevator.
- SS chamber with sliding door (hinged door on the back side for easy maintenance).
- Load-lock integrated chamber for loading samples under controlled atmosphere.
- Pneumatic locking system with sliding door.
- Completely secured against accidental misuse.
- Pressure sensors inside the glove box and the vacuum chamber
- Secured back door opening to avoid any accidental exposure to air
- Ergonomically designed with high flexibility & reliability.
Application
- Lithium batteries
- OLED / PLED
- Biology
