Pravartaka | Thin Film Processing Systems

Thin Film

Processing Systems

Thin Film Processing Equipments for R&D and Industrial environments
High-tech, Rugged & Reliable Automated Processing Systems
Faculty & Industry expert's guidance on Design and Technology deployment
Multi-technique in a cluster to achieve high throughput & quality films
Intuitive & Interactive Automation Control Feature for all processes & systems
High level of User & Process Safety inbuilt in to all the systems
Strong technical know-how & Process Support are the USP of Plassys

Evaporation System HV/ UHV - Thermal & e-Beam

Box shape chamber with front door, cylindrical chamber with top lid
Load-lock with substrate treatment (plasma, ion gun, heating, oxidation)
Up to 8″ standard single or multiple substrates

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Sputtering System HV/ UHV - RF/ DC/ Multi-tech

Cylindrical or parallelepipedal chambers, with front door or top lid
Standard chambers : 350, 400, 450, 600, 900 mm in diameter
Single wafer or cassette load-lock

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ION Milling System
RIBE / CAIBE

ICP sources – 14 or 20 cm beam size
Current density up to 4 mA/cm2
Energy Range from 100 to 1000 eV
Automatic pumping unit (Turbo / Cryo)
Manual or Automatic Load-Lock

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Diamond Growth by Systems - Mono & Poly Crystalline

SSDR 150 - Microwave plasma-assisted CVD (MW-PACVD) reactor
Dedicated to Diamond Film and Gem Synthesis
High power density plasma for high purity diamond films & high growth rate

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Special Application & Production Systems

Plassys benefits from more than 30 years of expertise in the vacuum and thin film segments. This know-how is aptly utilised to configure and build special and customized equipment that meets customer’s demands.

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Qubit Multi Technique / Chamber Cluster Systems

Quantum computer will be one of the most revolutionary technological advancements in the future. Plassys is on par with the rapid development of the Qubit devices. Plassys proposes a series of systems specifically...

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Glove Box Integrated Systems

PLASSYS offers a wide variety of systems integrated in glove box - Sputtering systems, Evaporation systems (thermal or electron beam gun). Any combination of deposition sources inside a single chamber or in two...

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Intuitive & Interactive Automation Control

Every Plassys system is supported by rugged electronics automation system aptly supported by interactive and intuitive controls. Plassys offers two modes of control choices for the users...

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