Qubit Multi Technique
Chamber Cluster Systems

Quantum computer will be one of the most revolutionary technological advancements in the future. Plassys is on par with the rapid development of the Qubit devices. Plassys proposes a series of systems specifically designed for Josephson Junctions deposition. Many multi-chamber systems have already been successfully designed and manufactured.

• Multi-chamber and Multi-technology HV/ UHV systems for 4’’ to 8’’ samples
• Load-lock for sample loading/ unloading
• Optional UHV sputtering chamber for Nb and Ti based superconducting films
• Evaporation UHV chamber & Oxidization UHV chamber
• Transfer between chambers by rods and/ or articulated arms.
• Transfer mechanisms are available in manual or automatic mode.
• Transfer valve operation (open/ close) is automatically managed by the system.

Application

• Qubit Devices